PROBLEM
SOLVED: Transistors of the
65-nm generation were plagued by
electrons that tunneled through the gate
insulation. Switching to a high-k
dielectric as a gate oxide solved that
problem but introduced others. Those
problems were solved by the introduction
of a new deposition technique and
swapping the silicon gate material for
two types of metal gates, allowing for
the introduction of 45-nm microprocessors.