RUNNING OUT OF ATOMS: The transistor’s gate
oxide thinned with each new technology
generation until it reached just 5 atoms (1.2
nm) thick. At that scale, the wave describing
the probable location of an electron [red curve,
top] is broader than the gate oxide, and the
electron can simply appear on the other side of
the gate oxide, having tunneled through the
insulation. This so-called gate leakage
increased 100-fold in the last three generations
of transistors. A switch to a new gate oxide, a
high-k dielectric,
was needed to plug the leak.