The speaker's words were at once laconic and
electrifying. "Contrary to what my colleagues have told
you about the bleak prospects for silicon transistors,"
he proclaimed in his matter-of-fact voice, "I happen to
have a few of them here in my pocket."
Silicon transistors? Did he say silicon transistors?
Yes—among the few in the world at that moment. It was
10 May 1954 [see "In the Beginning"].
A long and till-then uneventful session on silicon
devices had been winding down at the Institute of Radio
Engineers (IRE) National Conference on Airborne
Electronics, in Dayton, Ohio. There, a parade of
engineers and scientists were lamenting the sobering
challenges of developing and eventually manufacturing
silicon transistors. Amid the torpor, scattered
attendees were stifling yawns, glancing at watches, and
nodding off. But that was before Gordon Teal of Texas
Instruments Inc. made his surprising announcement—and
jaws dropped in disbelief.
"Did you say you have silicon transistors in
production?" asked a stupefied listener about 10 rows
back in the audience, which now began to perk up noticeably.
"Yes, we have three types of silicon transistors in
production," Teal replied, pulling several out of his
pocket to the general amazement and envy of the crowd.
Then, in a bit of quaint but effective razzle-dazzle, he
cranked up a record player, which began blaring out the
swinging sounds of Artie Shaw's big-band hit, "Summit
Ridge Drive." Amplified by germanium transistors, the
music died out instantly as Teal dunked one into a
beaker of hot oil. But when he repeated his
demonstration immersing a silicon transistor instead,
the music played on without faltering.
As his talk ended, Teal mentioned that copies of his
paper on the subject, innocuously titled "Some Recent
Developments in Silicon and Germanium Materials and
Devices," were available near the rear door. A crowd
stampeded back to get them, leaving the final speaker of
the session without an audience. Minutes later, a
Raytheon engineer was overheard in the lobby shouting
into a telephone: "They've got the silicon transistor
down in Texas!"
At the time, the silicon transistor seemed to be one
of the first major breakthroughs in transistor
development not to occur at Bell Telephone Laboratories
in Murray Hill, N.J., where physicists John Bardeen and
Walter Brattain had invented the transistor in December
1947. Their device featured two closely spaced metal
points jabbed delicately into a germanium surface—hence
its name, the "point-contact" transistor. They called
one point the "emitter" and the other point the
"collector," while a third contact, known as the "base,"
was applied to the back side of the germanium sliver. A
positive electrical bias on the emitter enhanced the
conductivity of the germanium just beneath the collector
point, amplifying the output current that flowed to it
from the base.
Bell Labs achieved a long string of firsts in the
years following that momentous invention, which it
announced six months later at a 30 June 1948 press
conference in New York City. Among its major advances
was the so-called junction transistor [see Transistor Firsts"], first
conceived the previous January by William Shockley, who
led the group that included Bardeen and Brattain. He
figured that much better transistor performance and
reliability could be realized by eliminating the fragile
point contacts and instead forming the emitter, base,
and collector as a single semiconductor sandwich with
three different layers [see sidebar, ""]. But—partly because the
frequency response of early junction transistors was
inferior to that of point-contact devices—Bell Labs
held off announcing this achievement for over a year,
until 4 July 1951. Five years later, Bardeen, Brattain,
and Shockley shared the Nobel Prize for inventing this
revolutionary solid-state amplifier.
Their brilliant pioneering work has overshadowed much
of the subsequent development years of the transistor,
including the crucial change from germanium to silicon
in the mid-1950s. That shift in semiconductor material
proved essential to the device's glorious future as the
fundamental building block of virtually all of today's
integrated circuits. For germanium, to put it simply,
was just not up to the task.
The material does have advantages: it is far less
reactive than silicon and much easier to work with
because of its lower melting temperature. And current
carriers—electrons and holes—flow through germanium
more rapidly than through silicon, which leads to higher
frequency response. But germanium also has serious
limitations. For example, it has a low band gap (0.67
electron volts versus 1.12 eV for silicon), the energy
required to knock electrons out of atoms into the
conduction band. So transistors made of this silvery
element have much higher leakage currents: as the
temperature increases, their delicately balanced
junctions become literally drowned in a swarming sea of
free electrons. Above about 75 °C, germanium transistors
quit working altogether. These limitations proved
bothersome to radio manufacturers and especially the
armed services, which needed stable, reliable equipment
that would perform in extreme conditions.
Nowhere were these concerns appreciated more than at
Bell Labs, which led the way into silicon semiconductor
research during the early 1950s. Working in its chemical
physics department with technician Ernie Buehler, Teal
grew single crystals of silicon and "doped" them with
tiny impurities to make solid-state diodes in February
1951, publishing the results a year later. He added
specific impurity atoms to the molten silicon to alter
the electrical properties of crystals drawn from it.
Elements from the fifth column of the periodic
table—arsenic or antimony, for example—create an
excess of electrons in the tetrahedral crystal
structure, yielding n-type silicon.
Elements from the third column, such as boron or
gallium, create a deficit of electrons (usually regarded
as an excess of holes), yielding p-type silicon. By
adding first one kind of impurity and then the other to
the molten silicon from which they slowly withdrew the
crystal, Teal and Buehler formed transition regions
called pn junctions between the two types of silicon.
Small bars cut across these junctions act as diodes when
a potential is applied across them through electrical
contacts on the two ends.
Meanwhile, Calvin Fuller was beginning experiments in
an adjacent lab on diffusing impurity atoms from hot
gases into the germanium or silicon surface—one of the
major technology milestones on the road to the
integrated circuit. By December 1953 Fuller was so
successful that Shockley started building a new research
team to attempt to fabricate silicon transistors using
the technique. And early in 1954, Fuller and Gerald
Pearson formed pn junctions by diffusing a thin layer of
boron atoms into a wafer of n-type silicon,
making a hole-rich p-layer on its
surface. These large-area diodes generated substantial
current when sunlight fell on them. On 25 April, Bell
Labs trumpeted this achievement as the "solar battery,"
the first photovoltaic cell operating at efficiencies
near 10 percent.
By then TI had made its
first silicon transistor—under Teal's
general direction. Back at Bell Labs, he had become
homesick for his native Texas, where he had grown up a
devout Baptist in South Dallas and pursued his
undergraduate studies in mathematics and chemistry at
Baylor University, in Waco. Restless in Murray Hill,
N.J., and looking for more responsibility, Teal
responded to an ad in The New York
Times for a research director at TI. He met
with TI vice president Pat Haggerty, who offered him the
position. He began there on 1 January 1953, bringing
with him his vast expertise in growing and doping
semiconductor crystals.
Under Haggerty's leadership, TI was moving
aggressively into military electronics, then burgeoning
with the Cold War in full swing. The Dallas company had
been founded during the 1930s as Geophysical Services
Inc., developing and producing reflection seismographs
for the oil industry. During World War II, it snagged a
U.S. Navy contract to supply airborne
submarine-detection equipment; afterward it continued to
expand its activities in military electronics,
reorganizing itself as Texas Instruments Inc. in 1951.
By the time Teal arrived, the firm had almost 1800
employees and was generating about US $25 million in
annual sales.
"They've got the silicon transistor down in Texas!"
The company was also beginning to manufacture what
were called grown-junction germanium transistors under
the direction of engineer Mark Shepherd. He had attended
a 1951 Bell Labs symposium on transistor technology with
Haggerty, where he listened to a Teal workshop on
growing semiconductor crystals. In early 1952, after
much wheedling and cajoling by Haggerty, TI purchased a
patent license to produce transistors from Western
Electric Co., AT and T's manufacturing arm, for $25 000.
By the end of that year, it was already manufacturing
and selling them under Shepherd's leadership.
Early the next year, Teal was back in Dallas
organizing TI's research department. Haggerty had hired
him to build a team of scientists and engineers that
could generate enough ideas and technologies to keep the
firm poised at the leading edge of the exploding
semiconductor industry. Teal was up to the challenge. He
was introverted and difficult to work with, but also
smart and stubborn. These qualities had served him well
at Bell Labs, where he pursued his crystal-growing
research in the late 1940s, working doggedly after hours
with almost no support from management. Perhaps most
important, this pioneering research had made him a minor
celebrity in the fledgling industry, which would prove
crucial in hiring bright young people for a group he had
to create from scratch. "We could never have attracted
the stable of people that we did without him," Shepherd
admitted in a 1993 interview. "And we got some really
outstanding scientists in those days."
Among his new hires was Willis Adcock, like Teal a
physical chemist with a Ph.D. from Brown University, in
Providence, R.I. He had been working for a natural gas
company in Oklahoma and joined TI early in 1953. Adcock
began leading a small research group focused on the task
of fabricating "grown-junction silicon single-crystal
and small-signal transistors that would meet military
environmental conditions," according to Teal, who viewed
this as the principal short-term goal for his new
research department.
It was no easy task at the time. Because of a high
melting temperature of 1415 °C and its great reactivity,
the molten silicon from which crystals are drawn
interacts with just about any crucible that can contain
it. Even fused quartz slowly reacts with the melt,
contaminating it with oxygen and other impurities that
subsequently find their way into the silicon crystal,
degrading its electrical performance. And most of the
silicon samples then available from suppliers came with
substantial impurities.
Unlike germanium, which could be purified using
zone-refining techniques so that impurities could be
reduced to about one part per billion, the purest
silicon available in those days had much higher levels.
And while silicon pn junctions had been fabricated for
more than a decade, ever since Russell Ohl first
achieved this feat at Bell Labs in 1940, making a
successful npn or pnp junction
transistor from this semiconductor material was far more
difficult. [See "The Origins of the pn Junction,"
IEEE
Spectrum, June 1997.] The main problem was
the extinction of so-called minority carriers (electrons
in p-type
or holes in n-type layers) due to
impurities in the base layer. Electrons will easily
"recombine" with holes at any impurity centers within
the base. Consequently, too few of these minority
carriers could survive while crossing this daunting
bridge between emitter and collector to achieve
sufficient current gain, or amplification, in silicon.
The only solution to this problem, other than struggling
to purify the silicon, was to make the base layer
extremely thin so that the minority carriers would have
some chance of making it from one side to the other.
Adcock, Teal, and their team wrestled with these
problems for over a year. Then, in April 1954, using a
special, high-purity silicon purchased from DuPont at
$500 a pound, they managed to grow a suitable npn structure with an
emitter region carefully doped to enhance current gain
and a p-type base layer
about 1-mil (25 micrometers) thick. Cutting a half-inch
(1.27-centimeter) bar from this crystal and attaching
electrical contacts on the morning of 14 April, Adcock's
group prepared to test it. Soon Haggerty got an excited
call from Teal urging him to come see a demonstration. A
few minutes later, "I was observing transistor action in
that first grown-junction transistor," Haggerty recalled
at TI's 25th-anniversary celebrations in 1979. It was a
defining moment for the budding semiconductor company.
Realizing that another company might well achieve the
same breakthrough, Teal hurriedly wrote a paper for
presentation at the Dayton conference. And held his
breath after Bell Labs announced the silicon solar
battery later that month.
Another company, in
fact, had already fabricated a working
silicon transistor a few months earlier. In January
1954, Morris Tanenbaum made one while working as a
member of Shockley's research group at Bell Labs. But
the world's dominant semiconductor company kept this
achievement under wraps, while the Texas upstart rushed
to announce it.
Tanenbaum had come to Bell Labs in June 1952 after
earning degrees in chemistry and physical chemistry at
Johns Hopkins University, in Baltimore, and Princeton
University, in New Jersey. He started out in the
chemical physics department, growing large single
crystals of various semiconductors and testing their
properties. In late 1953 Shockley invited him to join
the team being formed to push toward silicon
transistors. Tanenbaum continued working with Buehler,
Teal's former technician, whom he describes as "a master
craftsman in building apparatus and growing
semiconductor crystals."
Buehler was working on a technique known as rate
growing. The rate at which impurity atoms (such as
gallium and antimony) are incorporated from the melt
into the crystal depends to a great extent on the
crystal's growth rate—on how rapidly it is being pulled
from the melt. Both impurities are present in the melt
simultaneously, but the rate at which either one
crystallizes out depends on the pulling speed. This
process enabled the team to make much narrower base
layers, just 13 to 25 micrometers (µm) thick, which
proved to be crucial in limiting the extinction of
minority carriers. Tanenbaum cut a half-inch bar from
one high-purity silicon crystal that Buehler had grown
using special samples from DuPont; then he attached an
aluminum lead to the narrow base layer and carefully
reheated the silicon to restore the layer's p-type behavior. On
26 January 1954, according to his logbook, he achieved
sufficiently high electron current and hence
amplification in an npn silicon
transistor. "I believe these were the first silicon
transistors ever fabricated," says Tanenbaum, savoring
the moment in an interview nearly half a century later.
"When we made these first [silicon] transistors," he
continues, "we thought about patenting the process but
determined for two reasons that it wasn't worth the
effort." For one, others had developed and used similar
techniques. And he really did not like the rate-growing
process, which had already been patented by General
Electric Co. "It just wasn't controllable," he adds.
"From a manufacturing point of view, it just didn't look attractive."
Smart, stubborn, and introverted, Gordon Teal was
up to the challenge
At the time, Shockley's group was concentrating on
adapting the new diffusion process pioneered by Fuller
to the fabrication of germanium and silicon transistors.
Diffusion seemed much more promising—as indeed it
proved to be—because it was substantially more
controllable and could yield much narrower base layers,
just micrometers thick, and hence transistors that work
at higher frequencies. In July 1954 Charles Lee made a
successful germanium transistor at Bell Labs using
diffusion techniques, operating it at up to 500
megahertz. Tanenbaum spearheaded the effort to duplicate
this device in silicon, succeeding on 17 March 1955,
with an npn
transistor that worked at up to 120 MHz.
Thus, there was little enthusiasm for the rate-grown
silicon transistors that he had developed, and Bell Labs
made no effort to publicize the achievement. Tanenbaum
presented his results at the IRE Solid-State Device
Research Conference in June 1954. During the
question-and-answer session afterward, he recalls, Teal
mentioned similar work that had been done at TI—but was
cagey about specifics. Later that year Tanenbaum
submitted a paper about his research on rate-grown
silicon transistors to the Journal of Applied
Physics, where it was finally published in
June 1955.
By then the semiconductor industry was on the verge of
yet another fundamental shift. At the 1955 Solid-State
Device Research Conference held that same month, few
people mentioned rate-grown transistors. Everyone there
was talking excitedly about the newest breakthrough:
diffusion. And Shockley was getting ready to leave Bell
Labs to start his own semiconductor company focused on
silicon transistors.
It is hardly surprising
that the silicon transistor was invented
twice, in two seemingly independent achievements just
months apart. By 1954 the crucial underlying
technologies of silicon purification and crystal growth
were at a point where the silicon transistor was perhaps
inevitable, given the market demands—which were quite
different for the two companies. TI was focused on
military markets for transistors as replacements for the
bulkier and far more fragile vacuum tubes. The U.S.
armed services, among its biggest customers, were
willing to pay a big premium for transistors that
performed uniformly and flawlessly over a wide range of
conditions. Bell Labs' largest "customer" was AT and T's
Bell Telephone System, which needed rugged, long-lived
semiconductor switches that were truly "off" when they
were supposed to be off. Because of high leakage
currents, especially at elevated temperatures, germanium
transistors simply could not satisfy either of these
important customers.
It is also obvious that the two achievements had
common technological roots reaching back to the
pioneering crystal-growth research of Teal and Buehler
at Bell Labs from 1949 to 1952. Teal brought this
expertise with him to TI, although perhaps not the
rate-growing techniques developed a bit later by
Buehler. The two groups both benefited from the fact
that DuPont saw a growing market for high-purity,
"semiconductor-grade" silicon and was beginning to
supply small samples of the stuff in 1954. In both
cases, the road to the silicon transistor had to cross a
narrow, high-purity bridge made of the element.
Amidst all else that was happening at Bell Labs in the
early 1950s, the first silicon transistor may not have
seemed important enough to merit the same public
attention given earlier transistors and the solar cell.
At the time, the managers were likely looking ahead
eagerly to what they considered the real breakthrough:
transistors fabricated using diffusion that operated at
over 100MHz. And overconfidence may have played a role,
too. Bell Labs had habitually kept mum for months after
its earlier breakthroughs, thereby permitting its
scientists and engineers to work out most of the
patentable ramifications before going public.
Whatever the case, the delay allowed fledgling Texas
Instruments to leap forward and claim victory in this
race. And it stood alone as the first company to
manufacture silicon transistors in volume. Thanks to its
foresight and aggressiveness, TI had the silicon
transistor market essentially to itself for the next few
years—and started down the road to becoming the
international giant we know today.
For the Bell Labs angle on transistor invention and
development, see "The Transistor" by J. A. Hornbeck, in
A History of
Engineering and Science in the Bell System:
Electronics Technology (1925–1975) edited
by F.M. Smits (Murray Hill, N.J.: AT and T Bell
Laboratories, 1985), pp. 1–100.
More technical discussions are available in: "The
Invention of the Transistor" by Ian Ross, Proceedings of the
IEEE, Vol. 86, No. 1 (January 1998), pp.
7–28.
"Single Crystals of Germanium and Silicon—Basic to
the Transistor and Integrated Circuit" by G.K. Teal,
IEEE Transactions
on Electron Devices, Vol. ED-23, No. 7
(July 1976), pp. 621–39.