To protect the mesa's sensitive junctions, each
transistor was packaged into a pea-size hermetically
sealed metal can and then tested. Fairchild shipped the
first hundred of them to IBM on schedule that July,
billed at US $150 apiece. The next month, at the WESCON
electronics trade show, the founders discovered to their
delight that they were the only ones with silicon mesa
transistors on the market. “We scooped the industry!”
Noyce said, exulting at a Fairchild meeting a few days later.
About the only
person at Fairchild not celebrating was
Hoerni. A proud, charming, but irascible and often
volatile man, the scion of a Swiss banking family, he
was miffed that his p-n-p approach had
been passed over. But he was also a hardheaded
contrarian whose creative fires were stoked by
adversity. Hoerni not only didn't give up, he set out to
develop an even better transistor. Later that year, he
returned to the ideas written down in the opening pages
of his notebook. Could the oxide layer in fact be used
to protect the sensitive p-n junctions? There
were indications it might. That spring, reports had come
in from Bell Labs that the oxide layer indeed protected
the silicon underneath. Why not the junctions, too?
With a doctorate in crystal physics, Hoerni realized
that the impurity atoms coming through the tiny openings
in the oxide layer would diffuse sideways nearly as well
as downward into silicon's crystal structure. Which
meant that the junction interfaces would curl up under
the oxide layer surrounding an opening, just micrometers
farther out from its edges. If left in place instead of
being etched away, he figured, the oxide layer could
protect those junctions.
But the device Hoerni envisioned would not only be
more difficult to fabricate, its structure flew in the
face of conventional wisdom. Especially at Bell Labs and
Western Electric, the oxide layer was considered
“dirty”—filled with impurities after the diffusion
process—and thus had to be removed.
Meanwhile, serious concerns began to emerge in late
1958 and early 1959 about the mesa transistors Fairchild
was selling. Some of the devices were experiencing
amplification instabilities, and others were
malfunctioning. One important customer reported that a
transistor had suddenly stopped working altogether. A
Fairchild technician eventually traced the failures to
tiny dust particles and solder fragments trapped inside
the cans. The specks were attracted to the junctions by
the strong electric fields there. In a subsequent
quality-control procedure that became known as the tap
test, workers would tap on the cans with pencil erasers,
trying to dislodge any bits that might short out the
junctions. If that happened, the transistor was
discarded. Those were anxious days for the brash young
firm, for such failures in its only product threatened
its very existence.
Hoerni's single-minded pursuit of a more reliable
transistor proved timely indeed. In what Moore described
to me as a “kludge experiment” intended to assess
Hoerni's ideas, a technician deliberately left the oxide
layer on top of one of the p-n junctions in a
mesa transistor. When tested, it had substantially
better amplification stability—suggesting that Hoerni
was truly onto something. On 14 January 1959, he had two
of his notebook pages typed up as a formal disclosure
and sent to John Ralls, Fairchild's patent attorney.
Other than a few minor corrections and better drawings,
it was identical to the notebook entry he had written
more than a year earlier.
One problem with Hoerni's approach—and part of the
reason nobody attempted it at first—was that his
transistor structure was more complex than the mesa's,
requiring a fourth photolithographic mask to fabricate
it. Last and Noyce's step-and-repeat camera could
accommodate only three masks. But that February, Last
“jury-rigged a fourth mask” for this purpose, he
recalled in a recent telephone interview. On 2 March,
Hoerni wrote another entry in his notebook titled “A
method of manufacture of PNP transistors with oxide
protected junctions.” In two more pages of text and
drawings, he indicated specifically how to fabricate
such a device, though still stubbornly using silver for
the electrical contacts on the top side. By then, his
technicians were already transforming his novel ideas
into actual fabrication processes.
But all that progress came at a time of upheaval at
Fairchild. The same week that Hoerni was jotting down
his fabrication ideas, Edward Baldwin, who had been
hired from Hughes Electronics Corp. to serve as
Fairchild's general manager, departed abruptly to found
Rheem Semiconductor in Mountain View, taking with him
five key people from the manufacturing division. After
persistent urging by the other Fairchild cofounders,
Noyce stepped up to replace him, and Moore took over
Noyce's position as research director.
The following week, Hoerni invited several colleagues
to watch a demonstration of his new prototype
transistor. Under a microscope it appeared unlike any
other Fairchild device. Less than a millimeter across,
it was completely flat—no mesa protruded in the middle.
All that was visible was a circular metallic dot with a
metal ring around it, plus the oxide surface layer
between them. It resembled a bull's-eye target with a
portion of it pulled out like a teardrop, making it
easier to attach a wire [see photos, “Silicon
Flatland”].