The solution, we believe, lies in a fundamental change in the
machines that process the wafers: a switch from batch to single-wafer
manufacturing.
The single-wafer approach is a completely serial one, in which just one wafer
is processed at a time, all the way through the factory from
start to finish. There is never a time when the machines work
on a large batch of wafers at the same time, as they do today.
The single-wafer technique will solve the oversupply problem
by shortening the time it takes to make a finished, packaged
chip to less than one month, rather than the three months
or more that is typical today. Basically, with single-wafer
manufacturing, semiconductor companies will be able to produce
chips quickly when the orders come in, in the exact quantities
specified by those orders. There will be no need to build
up huge inventories that may just sit on shelves until they
become obsolete.
And it isn't just boutique chips, which are made in small quantities,
that would benefit from the single-wafer approach. Even commodities
like static random-access memory (SRAM) and microcontroller
chips, which suffer from periodic oversupply and the resulting
price plunges and reduced profits, would benefit from a more
agile response to changing market demands.
So what will it take to shift to single-wafer manufacturing? First,
consider today's typical semiconductor plant. It combines
single- and batch-processing steps; some of the machines process
wafers in groups, while others already process them singly.
True single-wafer manufacturing eliminates all the batch processes
and uses only machines that process wafers one at a time.
Today, only a few semiconductor plants have switched over
completely to single-wafer manufacturing.
In 2001, Trecenti Technologies Inc. of Hitachinaka, Japan (now part
of Renesas Technology Corp.), adopted 100 percent single-wafer
processing for the fabrication of advanced semiconductor ICs
on 300-mm wafers. The company's experience with this technique
has been remarkable. It has found that it can reduce manufacturing
time from 90 to 30 days, and the number of days needed for
each chip layer has dropped from 2.25 to 0.25. Even more remarkable
is the improvement in the fabrication time for a wafer of
SRAM chips made up of 130-nanometer structures. That time
has dropped from about 60 days to fewer than six days.
Several other IC manufacturers are also currently considering 100
percent single-wafer processing. Freescale, Philips, and STMicroelectronics
have formed the Crolles2 Alliance. Its 300-mm wafer facility,
in Crolles, France, uses single-wafer processing for most
steps. Tokyo-based Toshiba Corp.'s minifab, in Oita City,
Japan, is another example of IC manufacturing dominated by
single-wafer processing.
The fabrication of a finished, packaged IC
has three key groups of processing steps, regardless of whether
it happens in a conventional or a single-wafer setup. First,
the transistors are made; next, they're wired together into
circuits on the chip; and finally, the small slivers of silicon,
known as die, are packaged into finished chips [see illustration,
Once and Future Process].
Making transistors, described simply, is a sequential process that
builds the four major transistor components: the source, drain,
channel, and gate. Basically, the first step in the formation
of the transistor is to coat a silicon wafer with a photosensitive
material, called a photoresist. The photoresist is exposed
to light in the pattern of the areas in which transistors
are to be built. Each of these regions will eventually contain
the transistor's four components.